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Handbook of silicon based MEMS materials and technologies /
A comprehensive guide to MEMS materials, technologies and manufacturing, examining the state of the art with a particular emphasis on current and future applications. . Key topics covered include: .: . .; Silicon as MEMS material .; Material properties and measurement techniques .; Analytical method...
| Cote: | Libro Electrónico |
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| Autres auteurs: | |
| Format: | Électronique eBook |
| Langue: | Inglés |
| Publié: |
Amsterdam ; Boston :
William Andrew/Elsevier,
2010.
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| Édition: | 1st ed. |
| Collection: | Micro & nano technologies.
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| Sujets: | |
| Accès en ligne: | Texto completo |