Plasma processing of materials : scientific opportunities and technological challenges /

Bibliographic Details
Call Number:Libro Electrónico
Corporate Author: National Research Council (U.S.). Panel on Plasma Processing of Materials
Format: Electronic eBook
Language:Inglés
Published: Washington, D.C. : National Academy Press, 1991.
Subjects:
Plasma engineering.
Microelectronics > Materials > Effect of radiation on.
Surfaces (Technology)
Technique des plasmas.
Microélectronique > Matériaux > Effets du rayonnement sur.
Surfaces (Technologie)
TECHNOLOGY & ENGINEERING > Mechanical.
Online Access:Texto completo
Description
Physical Description:1 online resource (xii, 75 pages) : illustrations
ISBN:0585084637
9780585084633
1280203366
9781280203367
9786610203369
6610203369
0309583756
9780309583756

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