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Modellierung und Simulation Nichtlinearer Effekte in Kapazitiv Gekoppelten Hochfrequenzplasmen.
Annotation
| Call Number: | Libro Electrónico |
|---|---|
| Main Author: | |
| Format: | Electronic eBook |
| Language: | Alemán |
| Published: |
Berlin :
Logos Verlag Berlin,
2010.
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| Subjects: | |
| Online Access: | Texto completo |