Material Science and MEMS Production : Selected, Peer Reviewed Papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China /

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Collection of selected, peer reviewed papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China. The 19 papers are grouped as follows: Chapter 1: Materials Science, Processing and Application, Chapter 2: MEMS Design and Production Keyword: Mate...

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Détails bibliographiques
Cote:Libro Electrónico
Collectivité auteur: International Conference on MEMS and Nanotechnology Shenzhen, China
Autres auteurs: Liu, Changhui (Éditeur intellectuel)
Format: Électronique Actes de congrès eBook
Langue:Inglés
Publié: Zurich, Switzerland : Trans Tech Publications, [2014]
Collection:Advanced materials research ; v. 901.
Sujets:
Microelectromechanical systems > Congresses.
Nanotechnology > Congresses.
Microsystèmes électromécaniques > Congrès.
Nanotechnologie > Congrès.
TECHNOLOGY & ENGINEERING > Mechanical.
Microelectromechanical systems
Nanotechnology
Conference papers and proceedings
Accès en ligne:Texto completo
Description
Résumé:Collection of selected, peer reviewed papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China. The 19 papers are grouped as follows: Chapter 1: Materials Science, Processing and Application, Chapter 2: MEMS Design and Production Keyword: Materials Science, Processing and Application, MEMS Design and Production.
Description matérielle:1 online resource (117 pages) : illustrations (some color), graphs, photographs
Bibliographie:Includes bibliographical references and indexes.
ISBN:9783038264286
3038264288
ISSN:1662-8985 ;
1662-8985

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