Material Science and MEMS Production : Selected, Peer Reviewed Papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China /

Collection of selected, peer reviewed papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China. The 19 papers are grouped as follows: Chapter 1: Materials Science, Processing and Application, Chapter 2: MEMS Design and Production Keyword: Mate...

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Détails bibliographiques

Cote:	Libro Electrónico
Collectivité auteur:	International Conference on MEMS and Nanotechnology Shenzhen, China
Autres auteurs:	Liu, Changhui (Éditeur intellectuel)
Format:	Électronique Actes de congrès eBook
Langue:	Inglés
Publié:	Zurich, Switzerland : Trans Tech Publications, [2014]
Collection:	Advanced materials research ; v. 901.
Sujets:	Microelectromechanical systems > Congresses. Nanotechnology > Congresses. Microsystèmes électromécaniques > Congrès. Nanotechnologie > Congrès. TECHNOLOGY & ENGINEERING > Mechanical. Microelectromechanical systems Nanotechnology Conference papers and proceedings
Accès en ligne:	Texto completo