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Metallic oxynitride thin films by reactive sputtering and related deposition methods : processes, properties and applications /
This e-book provides valuable information about the process modeling, fabrication and characterization of metallic oxynitride-based thin films produced by reactive sputtering and some related deposition processes.
| Clasificación: | Libro Electrónico |
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| Autor principal: | |
| Otros Autores: | , |
| Formato: | Electrónico eBook |
| Idioma: | Inglés |
| Publicado: |
Sharjah :
Bentham Science Publishers,
2013.
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| Temas: | |
| Acceso en línea: | Texto completo |