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Silicon Technologies : Ion Implantation and Thermal Treatment.
The main purpose of this book is to remind new engineers in silicon foundry, the fundamental physical and chemical rules in major Front end treatments: oxidation, epitaxy, ion implantation and impurities diffusion.
| Cote: | Libro Electrónico |
|---|---|
| Auteur principal: | |
| Format: | Électronique eBook |
| Langue: | Inglés |
| Publié: |
London :
Wiley,
2013.
|
| Collection: | ISTE.
|
| Sujets: | |
| Accès en ligne: | Texto completo |
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