Digital holography for MEMS and microsystem metrology /

Approaching the topic of digital holography from the practical perspective of industrial inspection, "Digital Holography for MEMS and Microsystem Metrology" describes the process of digital holography and its growing applications for MEMS characterization, residual stress measurement, desi...

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Bibliographic Details
Call Number:Libro Electrónico
Other Authors: Asundi, Anand
Format: Electronic eBook
Language:Inglés
Published: Chichester : Wiley, Ã2011.
Series:Wiley microsystem and nanotechnology series.
Subjects:
Microelectromechanical systems > Measurement.
Microelectronics > Measurement.
Holographic testing.
Essais holographiques.
TECHNOLOGY & ENGINEERING > Electronics > Digital.
TECHNOLOGY & ENGINEERING > Electronics > Microelectronics.
Holographic testing
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