Digital holography for MEMS and microsystem metrology /

Approaching the topic of digital holography from the practical perspective of industrial inspection, "Digital Holography for MEMS and Microsystem Metrology" describes the process of digital holography and its growing applications for MEMS characterization, residual stress measurement, desi...

Description complète

Détails bibliographiques
Cote:Libro Electrónico
Autres auteurs: Asundi, Anand
Format: Électronique eBook
Langue:Inglés
Publié: Chichester : Wiley, Ã2011.
Collection:Wiley microsystem and nanotechnology series.
Sujets:
Microelectromechanical systems > Measurement.
Microelectronics > Measurement.
Holographic testing.
Essais holographiques.
TECHNOLOGY & ENGINEERING > Electronics > Digital.
TECHNOLOGY & ENGINEERING > Electronics > Microelectronics.
Holographic testing
Accès en ligne:Texto completo

Internet

Texto completo

Items no disponibles

Informations d'exemplaires de

Documents similaires