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Fundamental principles of optical lithography : the science of microfabrication /
The fabrication of an integrated circuit requires a variety of physical and chemical processes to be performed on a semiconductor substrate. In general, these processes fall into three categories: film deposition, patterning, and semiconductor doping. Films of both conductors and insulators are used...
| Cote: | Libro Electrónico |
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| Auteur principal: | |
| Format: | Électronique eBook |
| Langue: | Inglés |
| Publié: |
Chichester, West Sussex, England ; Hoboken, NJ, USA :
Wiley,
©2007.
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| Sujets: | |
| Accès en ligne: | Texto completo |