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Temperature Measurement during Millisecond Annealing Ripple Pyrometry for Flash Lamp Annealers /
Denise Reichel studies the delicate subject of temperature measurement during lamp-based annealing of semiconductors, in particular during flash lamp annealing. The approach of background-correction using amplitude-modulated light to obtain the sample reflectivity is reinvented from rapid thermal an...
| Cote: | Libro Electrónico |
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| Auteur principal: | |
| Collectivité auteur: | |
| Format: | Électronique eBook |
| Langue: | Inglés |
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Wiesbaden :
Springer Fachmedien Wiesbaden : Imprint: Springer,
2015.
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| Édition: | 1st ed. 2015. |
| Collection: | MatWerk,
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| Accès en ligne: | Texto Completo |