High Dielectric Constant Materials VLSI MOSFET Applications /

Issues relating to the high-K gate dielectric are among the greatest challenges for the evolving International Technology Roadmap for Semiconductors (ITRS). More than just an historical overview, this book will assess previous and present approaches related to scaling the gate dielectric and their i...

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Bibliographic Details
Call Number:Libro Electrónico
Corporate Author: SpringerLink (Online service)
Other Authors: Huff, Howard (Editor), Gilmer, David (Editor)
Format: Electronic eBook
Language:Inglés
Published: Berlin, Heidelberg : Springer Berlin Heidelberg : Imprint: Springer, 2005.
Edition:1st ed. 2005.
Series:Springer Series in Advanced Microelectronics, 16
Subjects:
Optical materials.
Condensed matter.
Surfaces (Technology).
Thin films.
Engineering.
Optical Materials.
Condensed Matter Physics.
Surfaces, Interfaces and Thin Film.
Technology and Engineering.
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