Ion Beams in Materials Processing and Analysis

A comprehensive review of ion beam application in modern materials research is provided, including the basics of ion beam physics and technology. The physics of ion-solid interactions for ion implantation, ion beam synthesis, sputtering and nano-patterning is treated in detail. Its applications in m...

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Bibliographic Details
Call Number:Libro Electrónico
Main Authors: Schmidt, Bernd (Author), Wetzig, Klaus (Author)
Corporate Author: SpringerLink (Online service)
Format: Electronic eBook
Language:Inglés
Published: Vienna : Springer Vienna : Imprint: Springer, 2013.
Edition:1st ed. 2013.
Subjects:
Surfaces (Technology).
Thin films.
Atoms.
Molecules.
Surfaces (Physics).
Surfaces, Interfaces and Thin Film.
Atomic, Molecular and Chemical Physics.
Surface and Interface and Thin Film.
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