Interfacial Compatibility in Microelectronics Moving Away from the Trial and Error Approach /

Interfaces between dissimilar materials are met everywhere in microelectronics and microsystems. In order to ensure faultless operation of these highly sophisticated structures, it is mandatory to have fundamental understanding of materials and their interactions in the system. In this difficult tas...

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Détails bibliographiques
Cote:Libro Electrónico
Auteurs principaux: Laurila, Tomi (Auteur), Vuorinen, Vesa (Auteur), Paulasto-Kröckel, Mervi (Auteur), Turunen, Markus (Auteur), Mattila, Toni T. (Auteur), Kivilahti, Jorma (Auteur)
Collectivité auteur: SpringerLink (Online service)
Format: Électronique eBook
Langue:Inglés
Publié: London : Springer London : Imprint: Springer, 2012.
Édition:1st ed. 2012.
Collection:Microsystems
Sujets:
Microtechnology.
Microelectromechanical systems.
Surfaces (Technology).
Thin films.
Optical materials.
Microsystems and MEMS.
Surfaces, Interfaces and Thin Film.
Optical Materials.
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