Interfacial Compatibility in Microelectronics Moving Away from the Trial and Error Approach /

Interfaces between dissimilar materials are met everywhere in microelectronics and microsystems. In order to ensure faultless operation of these highly sophisticated structures, it is mandatory to have fundamental understanding of materials and their interactions in the system. In this difficult tas...

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Bibliographic Details
Call Number:Libro Electrónico
Main Authors: Laurila, Tomi (Author), Vuorinen, Vesa (Author), Paulasto-Kröckel, Mervi (Author), Turunen, Markus (Author), Mattila, Toni T. (Author), Kivilahti, Jorma (Author)
Corporate Author: SpringerLink (Online service)
Format: Electronic eBook
Language:Inglés
Published: London : Springer London : Imprint: Springer, 2012.
Edition:1st ed. 2012.
Series:Microsystems
Subjects:
Microtechnology.
Microelectromechanical systems.
Surfaces (Technology).
Thin films.
Optical materials.
Microsystems and MEMS.
Surfaces, Interfaces and Thin Film.
Optical Materials.
Online Access:Texto Completo

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