Dynamics of Microelectromechanical Systems

This work presents a systematic view of the dynamics of MEMS (microelectromechanical systems), microstructures, and their responses. The focus is on the mecahnical/structural micro domain and the compliant nature of mechanical transmission. Features of this work include: An in-depth treatment of pro...

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Bibliographic Details
Call Number:Libro Electrónico
Main Author: Lobontiu, Nicolae (Author)
Corporate Author: SpringerLink (Online service)
Format: Electronic eBook
Language:Inglés
Published: New York, NY : Springer US : Imprint: Springer, 2007.
Edition:1st ed. 2007.
Series:Microsystems ; 17
Subjects:
Mechanical engineering.
Electronics.
Nanotechnology.
Electronic circuits.
Computer-aided engineering.
Mechanical Engineering.
Electronics and Microelectronics, Instrumentation.
Electronic Circuits and Systems.
Computer-Aided Engineering (CAD, CAE) and Design.
Online Access:Texto Completo
Table of Contents:
  • Microcantilevers and Microbridges: Bending and Torsion Resonant Frequencies
  • Micromechanical Systems: Modal Analysis
  • Energy Losses in MEMS and Equivalent Viscous Damping
  • Frequency and Time Response of MEMS.

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