Dynamics of Microelectromechanical Systems
This work presents a systematic view of the dynamics of MEMS (microelectromechanical systems), microstructures, and their responses. The focus is on the mecahnical/structural micro domain and the compliant nature of mechanical transmission. Features of this work include: An in-depth treatment of pro...
Call Number: | Libro Electrónico |
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Main Author: | |
Corporate Author: | |
Format: | Electronic eBook |
Language: | Inglés |
Published: |
New York, NY :
Springer US : Imprint: Springer,
2007.
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Edition: | 1st ed. 2007. |
Series: | Microsystems ;
17 |
Subjects: | |
Online Access: | Texto Completo |