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Handbook of silicon based MEMS materials and technologies /

The Handbook of Silicon Based MEMS Materials and Technologies, Second Edition, is a comprehensive guide to MEMS materials, technologies, and manufacturing that examines the state-of-the-art with a particular emphasis on silicon as the most important starting material used in MEMS. The book explains...

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Detalles Bibliográficos
Clasificación:Libro Electrónico
Otros Autores: Tilli, Markku (Editor )
Formato: Electrónico eBook
Idioma:Inglés
Publicado: London, UK : William Andrew is an imprint of Elsevier, 2015.
Edición:Second edition.
Colección:Micro & nano technologies.
Temas:
Acceso en línea:Texto completo