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Directed self-assembly of block copolymers for nano-manufacturing /
The directed self-assembly (DSA) method of patterning for microelectronics uses polymer phase-separation to generate features of less than 20nm, with the positions of self-assembling materials externally guided into the desired pattern. Directed self-assembly of Block Co-polymers for Nano-manufactur...
| Cote: | Libro Electrónico |
|---|---|
| Autres auteurs: | , |
| Format: | Électronique eBook |
| Langue: | Inglés |
| Publié: |
Cambridge :
Woodhead Publishing,
[2015]
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| Collection: | Woodhead Publishing series in electronic and optical materials ;
no. 83. |
| Sujets: | |
| Accès en ligne: | Texto completo |