Applied solid state science. advances in materials and device research / Supplement 2, Silicon integrated circuits. Part C :
Silicon Integrated Circuits, Part 2 covers some of the most promising approaches along with the new understanding of processing-related areas of physics and chemistry. The first chapter is about the transient thermal processing of silicon, including annealing with directed-energy beams and rapid iso...
Clasificación: | Libro Electrónico |
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Otros Autores: | , |
Formato: | Electrónico eBook |
Idioma: | Inglés |
Publicado: |
Orlando ; London :
Academic,
1985.
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Colección: | Applied solid state science. Supplement ;
2. |
Temas: | |
Acceso en línea: | Texto completo |