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Applied solid state science. advances in materials and device research / Supplement 2, Silicon integrated circuits. Part C :

Silicon Integrated Circuits, Part 2 covers some of the most promising approaches along with the new understanding of processing-related areas of physics and chemistry. The first chapter is about the transient thermal processing of silicon, including annealing with directed-energy beams and rapid iso...

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Detalles Bibliográficos
Clasificación:Libro Electrónico
Otros Autores: Wolfe, Raymond (Editor ), Kahng, Dawon (Editor )
Formato: Electrónico eBook
Idioma:Inglés
Publicado: Orlando ; London : Academic, 1985.
Colección:Applied solid state science. Supplement ; 2.
Temas:
Acceso en línea:Texto completo