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Applied solid state science. advances in materials and device research / Supplement 2, Silicon integrated circuits. Part C :
Silicon Integrated Circuits, Part 2 covers some of the most promising approaches along with the new understanding of processing-related areas of physics and chemistry. The first chapter is about the transient thermal processing of silicon, including annealing with directed-energy beams and rapid iso...
| Clasificación: | Libro Electrónico |
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| Otros Autores: | , |
| Formato: | Electrónico eBook |
| Idioma: | Inglés |
| Publicado: |
Orlando ; London :
Academic,
1985.
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| Colección: | Applied solid state science. Supplement ;
2. |
| Temas: | |
| Acceso en línea: | Texto completo |
| Sumario: | Silicon Integrated Circuits, Part 2 covers some of the most promising approaches along with the new understanding of processing-related areas of physics and chemistry. The first chapter is about the transient thermal processing of silicon, including annealing with directed-energy beams and rapid isothermal annealing; adiabatic annealing with laser and electron beams; pulsed melting; thermal flux annealing; rapid isothermal annealing; and several applications stemming from rapid annealing and semiconductor processing with directed-energy beams. The second chapter is concerned with the use of el. |
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| Notas: | Includes index. |
| Descripción Física: | 1 online resource (x, 359 pages) : illustrations |
| Bibliografía: | Includes bibliographical references at the end of each chapters and indexes. |
| ISBN: | 9781483214788 1483214788 |
| ISSN: | 0194-2891 ; |