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Organometallic vapor phase epitaxy : theory and practice /

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Here is one of the first single-author treatments of organometallic vapor-phase epitaxy (OMVPE)--a leading technique for the fabrication of semiconductor materials and devices. Also included are metal-organic molecular-beam epitaxy (MOMBE) and chemical-beam epitaxy (CBE) ultra-high-vacuum deposition...

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Detalles Bibliográficos
Clasificación:	Libro Electrónico
Autor principal:	Stringfellow, G. B. (Gerald B.), 1942-
Formato:	Electrónico eBook
Idioma:	Inglés
Publicado:	Boston : Academic Press, �1989.
Temas:	Compound semiconductors. Metal organic chemical vapor deposition. Epitaxy. �Epitaxie. Compos�es semi-conducteurs. D�ep�ot en phase vapeur par organom�etalliques. Epitaxy Compound semiconductors Metal organic chemical vapor deposition Metallorganische Verbindungen Gasphasenepitaxie
Acceso en línea:	Texto completo

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