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Organometallic vapor phase epitaxy : theory and practice /

Here is one of the first single-author treatments of organometallic vapor-phase epitaxy (OMVPE)--a leading technique for the fabrication of semiconductor materials and devices. Also included are metal-organic molecular-beam epitaxy (MOMBE) and chemical-beam epitaxy (CBE) ultra-high-vacuum deposition...

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Detalles Bibliográficos
Clasificación:Libro Electrónico
Autor principal: Stringfellow, G. B. (Gerald B.), 1942-
Formato: Electrónico eBook
Idioma:Inglés
Publicado: Boston : Academic Press, �1989.
Temas:
Acceso en línea:Texto completo