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Thin films by chemical vapour deposition /
The explosive growth in the semiconductor industry has caused a rapid evolution of thin film materials that lend themselves to the fabrication of state-of-the-art semiconductor devices. Early in the 1960s an old research technique named chemical vapour phase deposition (CVD), which has several uniqu...
| Clasificación: | Libro Electrónico |
|---|---|
| Autor principal: | |
| Formato: | Electrónico eBook |
| Idioma: | Inglés Romanian |
| Publicado: |
Amsterdam ; New York : Bucharest, Romania :
Elsevier ; Editura Tehnic�a,
1990.
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| Colección: | Thin films science and technology ;
7. |
| Temas: | |
| Acceso en línea: | Texto completo |