Thin films by chemical vapour deposition /
The explosive growth in the semiconductor industry has caused a rapid evolution of thin film materials that lend themselves to the fabrication of state-of-the-art semiconductor devices. Early in the 1960s an old research technique named chemical vapour phase deposition (CVD), which has several uniqu...
Clasificación: | Libro Electrónico |
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Autor principal: | |
Formato: | Electrónico eBook |
Idioma: | Inglés Romanian |
Publicado: |
Amsterdam ; New York : Bucharest, Romania :
Elsevier ; Editura Tehnic�a,
1990.
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Colección: | Thin films science and technology ;
7. |
Temas: | |
Acceso en línea: | Texto completo |