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Oxygen in silicon /
This volume reviews the latest understanding of the behavior and roles of oxygen in silicon, which will carry the field into the ULSI era from the experimental and theoretical points of view. The fourteen chapters, written by recognized authorities representing industrial and academic institutions,...
| Clasificación: | Libro Electrónico |
|---|---|
| Otros Autores: | |
| Formato: | Electrónico eBook |
| Idioma: | Inglés |
| Publicado: |
Boston :
Academic Press, Inc.,
�1994.
|
| Colección: | Semiconductors and semimetals ;
v. 42. |
| Temas: | |
| Acceso en línea: | Texto completo Texto completo |
Tabla de Contenidos:
- Front Cover; Oxygen in Silicon: Semiconductors and Semimetals; Copyright Page; Contents; List of Contributors; Preface; Chapter 1. Introduction to Oxygen in Silicon; Chapter 2. The Incorporation of Oxygen into Silicon Crystals; Chapter 3. Characterization Techniques for Oxygen in Silicon; Chapter 4. Oxygen Concentration Measurement; Chapter 5. Intrinsic Point Defects in Silicon; Chapter 6. Some Atomic Configurations of Oxygen; Chapter 7. Electrical Properties of Oxygen in Silicon; Chapter 8. Diffusion of Oxygen in Silicon.