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Oxygen in silicon /
This volume reviews the latest understanding of the behavior and roles of oxygen in silicon, which will carry the field into the ULSI era from the experimental and theoretical points of view. The fourteen chapters, written by recognized authorities representing industrial and academic institutions,...
| Clasificación: | Libro Electrónico |
|---|---|
| Otros Autores: | |
| Formato: | Electrónico eBook |
| Idioma: | Inglés |
| Publicado: |
Boston :
Academic Press, Inc.,
�1994.
|
| Colección: | Semiconductors and semimetals ;
v. 42. |
| Temas: | |
| Acceso en línea: | Texto completo Texto completo |