Cargando…
Oxygen in silicon /
This volume reviews the latest understanding of the behavior and roles of oxygen in silicon, which will carry the field into the ULSI era from the experimental and theoretical points of view. The fourteen chapters, written by recognized authorities representing industrial and academic institutions,...
| Clasificación: | Libro Electrónico |
|---|---|
| Otros Autores: | |
| Formato: | Electrónico eBook |
| Idioma: | Inglés |
| Publicado: |
Boston :
Academic Press, Inc.,
�1994.
|
| Colección: | Semiconductors and semimetals ;
v. 42. |
| Temas: | |
| Acceso en línea: | Texto completo Texto completo |
| Sumario: | This volume reviews the latest understanding of the behavior and roles of oxygen in silicon, which will carry the field into the ULSI era from the experimental and theoretical points of view. The fourteen chapters, written by recognized authorities representing industrial and academic institutions, cover thoroughly the oxygen related phenomena from the crystal growth to device fabrication processes, as well as indispensable diagnostic techniques for oxygen. Key Features* Comprehensive study of the behavior of oxygen in silicon* Discusses silicon crystals f. |
|---|---|
| Descripción Física: | 1 online resource (xvi, 679 pages) : illustrations |
| Bibliografía: | Includes bibliographical references and index. |
| ISBN: | 9780080864396 0080864392 1281514233 9781281514233 |