Rapid thermal processing : science and technology /

This is the first definitive book on rapid thermal processing (RTP), an essential namufacturing technology for single-wafer processing in highly controlled environments. Written and edited by nine experts in the field, this book covers a range of topics for academics and engineers alike, moving from...

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Detalles Bibliográficos
Clasificación:Libro Electrónico
Otros Autores: Fair, Richard B.
Formato: Electrónico eBook
Idioma:Inglés
Publicado: Boston : Academic Press, �1993.
Temas:
Semiconductors > Heat treatment.
Semiconductor doping.
Rapid thermal processing.
Semi-conducteurs > Traitement thermique.
Semi-conducteurs > Dopage.
Recuit thermique rapide.
Rapid thermal processing
Semiconductor doping
Semiconductors > Heat treatment
Tecnologia de dispositivos semicondutores.
Semiconductors
Acceso en línea:Texto completo
Descripción
Sumario:This is the first definitive book on rapid thermal processing (RTP), an essential namufacturing technology for single-wafer processing in highly controlled environments. Written and edited by nine experts in the field, this book covers a range of topics for academics and engineers alike, moving from basic theory to advanced technology for wafer manufacturing. The book also provides new information on the suitability or RTP for thin film deposition, junction formation, silicides, epitaxy, and in situ processing. Complete discussions on equipment designs and comparisons between RTP and other processing approaches also make this book useful for supplemental information on silicon processing, VLSI processing, and integrated circuit engineering.
Descripción Física:1 online resource (viii, 430 pages) : illustrations
Bibliografía:Includes bibliographical references and index.

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