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Rapid thermal processing : science and technology /

This is the first definitive book on rapid thermal processing (RTP), an essential namufacturing technology for single-wafer processing in highly controlled environments. Written and edited by nine experts in the field, this book covers a range of topics for academics and engineers alike, moving from...

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Detalles Bibliográficos
Clasificación:Libro Electrónico
Otros Autores: Fair, Richard B.
Formato: Electrónico eBook
Idioma:Inglés
Publicado: Boston : Academic Press, �1993.
Temas:
Acceso en línea:Texto completo