Cargando…
Dry etching for microelectronics /
This volume collects together for the first time a series of in-depth, critical reviews of important topics in dry etching, such as dry processing of III-V compound semiconductors, dry etching of refractory metal silicides and dry etching aluminium and aluminium alloys. This topical format provides...
| Clasificación: | Libro Electrónico |
|---|---|
| Otros Autores: | |
| Formato: | Electrónico eBook |
| Idioma: | Inglés |
| Publicado: |
Amsterdam ; New York : New York, N.Y. :
North-Holland Physics Pub. ; Distributors for the USA and Canada, Elsevier Science Pub. Co.,
1984.
|
| Colección: | Materials processing, theory and practices ;
v. 4. |
| Temas: | |
| Acceso en línea: | Texto completo Texto completo |