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Laser microfabrication : thin film processes and lithography /
This book reviews the solid core of fundamental scientific knowledge on laser-stimulated surface chemistry that has accumulated over the past few years. It provides a useful overview for the student and interested non-expert as well as essential reference data (photodissociation cross sections, ther...
| Clasificación: | Libro Electrónico |
|---|---|
| Otros Autores: | , |
| Formato: | Electrónico eBook |
| Idioma: | Inglés |
| Publicado: |
Boston :
Academic Press,
�1989.
|
| Temas: | |
| Acceso en línea: | Texto completo |
MARC
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| 019 | |a 648565959 |a 842936691 | ||
| 020 | |a 9780080918020 |q (electronic bk.) | ||
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| 020 | |z 9780122334306 | ||
| 035 | |a (OCoLC)596565395 |z (OCoLC)648565959 |z (OCoLC)842936691 | ||
| 042 | |a dlr | ||
| 050 | 4 | |a TA1677 |b .L366 1989 | |
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| 084 | |a FER 786f |2 stub | ||
| 245 | 0 | 0 | |a Laser microfabrication : |b thin film processes and lithography / |c edited by Daniel J. Ehrlich, Jeffrey Y. Tsao. |
| 260 | |a Boston : |b Academic Press, |c �1989. | ||
| 300 | |a 1 online resource (xii, 587 pages) : |b illustrations | ||
| 336 | |a text |b txt |2 rdacontent | ||
| 337 | |a computer |b c |2 rdamedia | ||
| 338 | |a online resource |b cr |2 rdacarrier | ||
| 504 | |a Includes bibliographical references and index. | ||
| 505 | 2 | |a Sources, optics, and laser microfabrications systems for direct writing and projection lithography / Y.S. Liu -- Laser-stimulated molecular processes on surfaces / T.J. Chuang -- Spectroscopy and photochemistry of gases, adsorbates, and liquids / M. Rothschild -- Photophysics and thermophysics of light absorption and energy transport in solids / C.I.H. Ashby and J.Y. Tsao -- Transport and kinetics / H.J. Zeigler, D.J. Ehrlich, and J.Y. Tsao -- Laser etching / John J. Ritsko -- Laser deposition : energetics and chemical kinetics / R.L. Jackson [and others] -- Laser deposition : experimental approaches / J. Haigh and M.R. Aylett -- Epitaxy / S.J.C. Irvine -- Doping and oxidation / Ian W. Boyd. | |
| 506 | |3 Use copy |f Restrictions unspecified |2 star |5 MiAaHDL | ||
| 533 | |a Electronic reproduction. |b [Place of publication not identified] : |c HathiTrust Digital Library, |d 2010. |5 MiAaHDL | ||
| 538 | |a Master and use copy. Digital master created according to Benchmark for Faithful Digital Reproductions of Monographs and Serials, Version 1. Digital Library Federation, December 2002. |u http://purl.oclc.org/DLF/benchrepro0212 |5 MiAaHDL | ||
| 583 | 1 | |a digitized |c 2010 |h HathiTrust Digital Library |l committed to preserve |2 pda |5 MiAaHDL | |
| 588 | 0 | |a Print version record. | |
| 520 | |a This book reviews the solid core of fundamental scientific knowledge on laser-stimulated surface chemistry that has accumulated over the past few years. It provides a useful overview for the student and interested non-expert as well as essential reference data (photodissociation cross sections, thermochemical constants, etc.) for the active researcher. | ||
| 650 | 0 | |a Lasers |x Industrial applications. | |
| 650 | 0 | |a Thin film devices |x Design and construction. | |
| 650 | 0 | |a Microlithography. | |
| 650 | 0 | |a Microfabrication. | |
| 650 | 6 | |a Lasers |x Applications industrielles. |0 (CaQQLa)201-0259323 | |
| 650 | 6 | |a Microlithographie. |0 (CaQQLa)201-0141616 | |
| 650 | 6 | |a Microfabrication. |0 (CaQQLa)201-0292593 | |
| 650 | 7 | |a TECHNOLOGY & ENGINEERING |x Lasers & Photonics. |2 bisacsh | |
| 650 | 7 | |a Lasers |x Industrial applications |2 fast |0 (OCoLC)fst00992853 | |
| 650 | 7 | |a Microfabrication |2 fast |0 (OCoLC)fst01019807 | |
| 650 | 7 | |a Microlithography |2 fast |0 (OCoLC)fst01019883 | |
| 650 | 7 | |a Thin film devices |x Design and construction |2 fast |0 (OCoLC)fst01150013 | |
| 650 | 7 | |a D�unnschichttechnik |2 gnd |0 (DE-588)4136339-5 | |
| 650 | 7 | |a Laserbearbeitung |2 gnd |0 (DE-588)4139080-5 | |
| 650 | 7 | |a Oberfl�achenbehandlung |2 gnd |0 (DE-588)4042908-8 | |
| 650 | 7 | |a Laser |2 gnd |0 (DE-588)4034610-9 | |
| 650 | 0 | 7 | |a Photolithographie (Halbleitertechnologie) |2 swd |
| 700 | 1 | |a Ehrlich, Daniel J. | |
| 700 | 1 | |a Tsao, Jeffrey Y. | |
| 776 | 0 | 8 | |i Print version: |t Laser microfabrication. |d Boston : Academic Press, �1989 |w (DLC) 88024215 |w (OCoLC)18379020 |
| 856 | 4 | 0 | |u https://sciencedirect.uam.elogim.com/science/book/9780122334306 |z Texto completo |