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Laser microfabrication : thin film processes and lithography /

This book reviews the solid core of fundamental scientific knowledge on laser-stimulated surface chemistry that has accumulated over the past few years. It provides a useful overview for the student and interested non-expert as well as essential reference data (photodissociation cross sections, ther...

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Detalles Bibliográficos
Clasificación:Libro Electrónico
Otros Autores: Ehrlich, Daniel J., Tsao, Jeffrey Y.
Formato: Electrónico eBook
Idioma:Inglés
Publicado: Boston : Academic Press, �1989.
Temas:
Acceso en línea:Texto completo