Handbook of ellipsometry /
The Handbook of Ellipsometry is a critical foundation text on an increasingly critical subject. Ellipsometry, a measurement technique based on phase and amplitude changes in polarized light, is becoming popular in a widening array of applications because of increasing miniaturization of integrated c...
Clasificación: | Libro Electrónico |
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Otros Autores: | , |
Formato: | Electrónico eBook |
Idioma: | Inglés |
Publicado: |
Norwich, NY : Heidelberg, Germany :
William Andrew Pub. ; Springer,
�2005.
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Temas: | |
Acceso en línea: | Texto completo |