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Modeling of film deposition for microelectronic applications /
Physics of Thin Films is one of the longest running continuing series in thin film science, consisting of 22 volumes since 1963. The series contains quality studies of the properties of various thin filmsmaterials and systems. In order to be able to reflect the development of today's science an...
| Clasificación: | Libro Electrónico |
|---|---|
| Otros Autores: | |
| Formato: | Electrónico eBook |
| Idioma: | Inglés |
| Publicado: |
San Diego :
Academic Press,
�1996.
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| Colección: | Thin films ;
v. 22. |
| Temas: | |
| Acceso en línea: | Texto completo Texto completo Texto completo |
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