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Photopolymers : photoresist materials, processes, and applications /

Detalles Bibliográficos
Autor principal:	Nakamura, Kenichiro (Chemical engineer) (Autor)
Formato:	Electrónico eBook
Idioma:	Inglés
Publicado:	[Place of publication not identified] : CRC Press, 2018.
Colección:	Optics and photonics
Temas:	Photopolymers. Photoresists. Photopolymerization. Photopolymers > Industrial applications. Microelectronics > Materials. Photopolymères. Résines photosensibles. Photopolymérisation. Photopolymères > Applications industrielles. Microélectronique > Matériaux.
Acceso en línea:	Texto completo (Requiere registro previo con correo institucional)

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