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Photopolymers : photoresist materials, processes, and applications /
| Autor principal: | |
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| Formato: | Electrónico eBook |
| Idioma: | Inglés |
| Publicado: |
[Place of publication not identified] :
CRC Press,
2018.
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| Colección: | Optics and photonics
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| Temas: | |
| Acceso en línea: | Texto completo (Requiere registro previo con correo institucional) |
| Notas: | <P>Introduction</P><P>About the Author</P><B><P>Basic Idea of Photopolymerization</P></B><P>Introduction</P><P>Radical Polymerization</P><P>Monomers for Photopolymerization</P><P>Initiators of Photopolymerization</P><P>Inhibition of Polymerization</P><P>Cationic Photopolymerization</P><P>Photocrosslinking</P><P>Scission of Polymers</P><P>References</P><B><P>Chemically Amplified Resists</P></B><P>Introduction</P><P>Chemical Amplification of Photopolymers</P><P>Polymers for Chemical Amplification</P><P>Photoacid Generator</P><P>References</P><B><P>Process of Chemically Amplified Resists</P></B><P>Introduction</P><P>Progress of Resolution Limit</P><P>Immersion Lithography</P><P>Double Patterning </P><P>EUV Lithography</P><P>Direct Self-Assembly (DSA)</P><P>References</P><B><P>Nanoimprinting</P></B><P>Introduction</P><P>Thermal Nanoimprinting</P><P>UV Nanoimprinting</P><P>Cationic Polymerization of UV Nanoimprinting</P><P>Ene-Thiol Polymerization of UV Nanoimprinting</P><P>Soft Lithography</P><P>References</P><B><P>Industrial Applications of Photopolymers</P></B><P>Introduction</P><P>Application to Electronics</P><P>Optical Adhesive Polymers</P><P>Holographic Photopolymers</P><P>Application to Medical Materials</P><P>Microelectromechanical Systems (MEMS)</P><P>References</P> |
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| Descripción Física: | 1 online resource (189 pages : 44 illustrations |
| ISBN: | 9781351832229 1351832220 |