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| LEADER |
00000cam a2200000Mi 4500 |
| 001 |
KNOVEL_on1340114445 |
| 003 |
OCoLC |
| 005 |
20231027140348.0 |
| 006 |
m d |
| 007 |
cr |n||||||||| |
| 008 |
211129s2021 sz a ob 101 0 eng d |
| 010 |
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|z 2021448165
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| 040 |
|
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|a COA
|b eng
|c COA
|d OCLCF
|d OCLCQ
|d OCLCO
|
| 020 |
|
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|a 9783035718010
|
| 020 |
|
|
|a 3035718016
|
| 020 |
|
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|z 9783035738018 (PDF ebook)
|
| 024 |
8 |
|
|a (WaSeSS)ssj0002574294
|
| 035 |
|
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|a (OCoLC)1340114445
|
| 050 |
0 |
0 |
|a TK7871.85
|b .I58435 2021
|
| 082 |
0 |
4 |
|a 537.622
|q OCoLC
|2 23/eng/20230216
|
| 049 |
|
|
|a UAMI
|
| 111 |
2 |
|
|a International Symposium on Ultra Clean Processing of Semiconductor Surfaces
|n (15th :
|d 2021 :
|c Mechelen, Belgium)
|
| 240 |
1 |
0 |
|a Ultra clean processing of semiconductor surfaces XV (Online)
|
| 245 |
1 |
0 |
|a Ultra clean processing of semiconductor surfaces XV
|h [electronic resource] :
|b selected peer-reviewed full text papers from the 15th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS) : selected peer-reviewed full text papers from the 15th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS), April 12-15, 2021, Mechelen, Belgium.
|
| 260 |
|
|
|a Baech, Switzerland :
|b Scientific.Net :
|b distributed worldwide by Trans Tech Publications Ltd,
|c [2021]
|
| 300 |
|
|
|a 1 online resource (xiv, 325 pages :)
|b illustrations.
|
| 490 |
0 |
|
|a Solid state phenomena,
|x 1012-0394 ;
|v volume 314.
|
| 504 |
|
|
|a Includes bibliographical references and index.
|
| 590 |
|
|
|a Knovel
|b ACADEMIC - Safety & Industrial Hygiene
|
| 650 |
|
0 |
|a Semiconductors
|x Surfaces
|v Congresses.
|
| 650 |
|
0 |
|a Semiconductors
|v Congresses.
|
| 650 |
|
6 |
|a Semi-conducteurs
|x Surfaces
|v Congrès.
|
| 650 |
|
6 |
|a Semi-conducteurs
|v Congrès.
|
| 650 |
|
7 |
|a Semiconductors
|2 fast
|
| 650 |
|
7 |
|a Semiconductors
|x Surfaces
|2 fast
|
| 655 |
|
7 |
|a Conference papers and proceedings
|2 fast
|
| 700 |
1 |
|
|a Mertens, Paul.
|
| 700 |
1 |
|
|a Wostyn, Kurt.
|
| 700 |
1 |
|
|a Meuris, Marc.
|
| 700 |
1 |
|
|a Heyns, Marc.
|
| 856 |
4 |
0 |
|u https://appknovel.uam.elogim.com/kn/resources/kpUCPSSXV2/toc
|z Texto completo
|
| 994 |
|
|
|a 92
|b IZTAP
|
