Handbook of silicon based MEMS materials and technologies /
The Handbook of Silicon Based MEMS Materials and Technologies, Second Edition, is a comprehensive guide to MEMS materials, technologies, and manufacturing that examines the state-of-the-art with a particular emphasis on silicon as the most important starting material used in MEMS. The book explains...
Clasificación: | Libro Electrónico |
---|---|
Otros Autores: | |
Formato: | Electrónico eBook |
Idioma: | Inglés |
Publicado: |
London, UK :
William Andrew is an imprint of Elsevier,
2015.
|
Edición: | Second edition. |
Colección: | Micro & nano technologies.
|
Temas: | |
Acceso en línea: | Texto completo |