Introduction to semiconductor manufacturing technology /

Integrated circuit fabrication is a complex process, and engineers must have a deep understanding of the intricate technologies involved in order to be successful. This book, intended for technical and college students, provides an overview of key concepts, equipment, and techniques used in fabs tod...

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Detalles Bibliográficos
Clasificación:Libro Electrónico
Autor principal: Xiao, Hong, 1961-
Autor Corporativo: Society of Photo-Optical Instrumentation Engineers
Formato: Electrónico eBook
Idioma:Inglés
Publicado: Bellingham, Wash. (1000 20th St. Bellingham WA 98225-6705 USA) : SPIE Press, [2012]
Edición:Second edition.
Colección:SPIE monograph ; PM220.
Temas:
Integrated circuits > Design and construction.
Semiconductors > Design and construction.
Semiconductor industry.
Circuits intégrés > Conception et construction.
Semi-conducteurs > Industrie.
TECHNOLOGY & ENGINEERING > Mechanical.
Integrated circuits > Design and construction
Semiconductor industry
Semiconductors > Design and construction
Acceso en línea:Texto completo
Tabla de Contenidos:
  • Preface to the first edition
  • Preface to the second edition
  • Chapter 1. Introduction
  • Chapter 2. Introduction to integrated circuit fabrication
  • Chapter 3. Semiconductor basics
  • Chapter 4. Wafer manufacturing, epitaxy, and substrate engineering
  • Chapter 5. Thermal processes
  • Chapter 6. Photolithography
  • Chapter 7. Plasma basics
  • Chapter 8. Ion implantation
  • Chapter 9. Etch
  • Chapter 10. Chemical vapor deposition and dielectric thin films
  • Chapter 11. Metallization
  • Chapter 12. Chemical mechanical polishing
  • Chapter 13. Process integration
  • Chapter 14. Integrated circuit processing technologies
  • Chapter 15. Future trends and summary.

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