Introduction to semiconductor manufacturing technology /
Integrated circuit fabrication is a complex process, and engineers must have a deep understanding of the intricate technologies involved in order to be successful. This book, intended for technical and college students, provides an overview of key concepts, equipment, and techniques used in fabs tod...
Clasificación: | Libro Electrónico |
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Autor principal: | |
Autor Corporativo: | |
Formato: | Electrónico eBook |
Idioma: | Inglés |
Publicado: |
Bellingham, Wash. (1000 20th St. Bellingham WA 98225-6705 USA) :
SPIE Press,
[2012]
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Edición: | Second edition. |
Colección: | SPIE monograph ;
PM220. |
Temas: | |
Acceso en línea: | Texto completo |