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Introduction to semiconductor manufacturing technology /

Integrated circuit fabrication is a complex process, and engineers must have a deep understanding of the intricate technologies involved in order to be successful. This book, intended for technical and college students, provides an overview of key concepts, equipment, and techniques used in fabs tod...

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Detalles Bibliográficos
Clasificación:Libro Electrónico
Autor principal: Xiao, Hong, 1961-
Autor Corporativo: Society of Photo-Optical Instrumentation Engineers
Formato: Electrónico eBook
Idioma:Inglés
Publicado: Bellingham, Wash. (1000 20th St. Bellingham WA 98225-6705 USA) : SPIE Press, [2012]
Edición:Second edition.
Colección:SPIE monograph ; PM220.
Temas:
Acceso en línea:Texto completo
Descripción
Sumario:Integrated circuit fabrication is a complex process, and engineers must have a deep understanding of the intricate technologies involved in order to be successful. This book, intended for technical and college students, provides an overview of key concepts, equipment, and techniques used in fabs today. A history of the field is included as context for modern practictioners. The second edition covers advancements made in the past decade and adds new illustrations.
Notas:"SPIE Digital Library."--Website
Descripción Física:1 online resource (xix, 656 pages) : illustrations
Bibliografía:Includes bibliographical references.
ISBN:9780819490933
0819490938
9781628701043
1628701048