Introduction to semiconductor manufacturing technology /
Integrated circuit fabrication is a complex process, and engineers must have a deep understanding of the intricate technologies involved in order to be successful. This book, intended for technical and college students, provides an overview of key concepts, equipment, and techniques used in fabs tod...
Clasificación: | Libro Electrónico |
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Autor principal: | |
Autor Corporativo: | |
Formato: | Electrónico eBook |
Idioma: | Inglés |
Publicado: |
Bellingham, Wash. (1000 20th St. Bellingham WA 98225-6705 USA) :
SPIE Press,
[2012]
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Edición: | Second edition. |
Colección: | SPIE monograph ;
PM220. |
Temas: | |
Acceso en línea: | Texto completo |
Sumario: | Integrated circuit fabrication is a complex process, and engineers must have a deep understanding of the intricate technologies involved in order to be successful. This book, intended for technical and college students, provides an overview of key concepts, equipment, and techniques used in fabs today. A history of the field is included as context for modern practictioners. The second edition covers advancements made in the past decade and adds new illustrations. |
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Notas: | "SPIE Digital Library."--Website |
Descripción Física: | 1 online resource (xix, 656 pages) : illustrations |
Bibliografía: | Includes bibliographical references. |
ISBN: | 9780819490933 0819490938 9781628701043 1628701048 |