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Substrate surface preparation handbook /
"Substrate Surface Preparation Handbook serves as a practical, one-stop reference, covering the technologies developed to produce flat surfaces with nanometer accuracy for the subsequent building of semiconductor devices and integrated circuits. This hands-on resource offers you detailed guidan...
| Clasificación: | Libro Electrónico |
|---|---|
| Autor principal: | |
| Formato: | Electrónico eBook |
| Idioma: | Inglés |
| Publicado: |
Boston :
Artech House,
2012.
|
| Colección: | Artech House applied photonics series.
|
| Temas: | |
| Acceso en línea: | Texto completo |
Tabla de Contenidos:
- Introduction
- Preparation : before the start
- Lapping
- Polishing
- Specific processes and materials
- Specialized techniques
- Surface finish
- Optics
- Semiconductor device Deconstruction
- Metallurgical Polishing and Microscopy
- Laboratory Setup
- Using Interferometry.