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Substrate surface preparation handbook /

"Substrate Surface Preparation Handbook serves as a practical, one-stop reference, covering the technologies developed to produce flat surfaces with nanometer accuracy for the subsequent building of semiconductor devices and integrated circuits. This hands-on resource offers you detailed guidan...

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Detalles Bibliográficos
Clasificación:Libro Electrónico
Autor principal: Robertson, Max
Formato: Electrónico eBook
Idioma:Inglés
Publicado: Boston : Artech House, 2012.
Colección:Artech House applied photonics series.
Temas:
Acceso en línea:Texto completo