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Advances in CMP/polishing technologies for the manufacture of electronic devices /
CMP and polishing are the most precise processes used to finish the surfaces of mechanical and electronic or semiconductor components. --P. 4 of cover.
| Clasificación: | Libro Electrónico |
|---|---|
| Otros Autores: | , , |
| Formato: | Electrónico eBook |
| Idioma: | Inglés |
| Publicado: |
Oxford :
Elsevier,
2012.
|
| Edición: | 1st ed. |
| Temas: | |
| Acceso en línea: | Texto completo |
| Sumario: | CMP and polishing are the most precise processes used to finish the surfaces of mechanical and electronic or semiconductor components. --P. 4 of cover. |
|---|---|
| Descripción Física: | 1 online resource (xii, 317 pages) : illustrations, color portraits |
| Bibliografía: | Includes bibliographical references and index. |
| ISBN: | 9781437778601 1437778607 |