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EUV lithography /

Dr. Bakshi has compiled a thorough, clear reference text covering the important fields of EUV lithography for high-volume manufacturing. This book has resulted from his many years of experience in EUVL development and from teaching this subject to future specialists. The book proceeds from an histor...

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Detalles Bibliográficos
Clasificación:Libro Electrónico
Otros Autores: Bakshi, Vivek
Formato: Electrónico eBook
Idioma:Inglés
Publicado: Bellingham, Wash. : Hoboken, NJ : SPIE Press ; John Wiley, ©2009.
Colección:SPIE monograph ; PM178.
Temas:
Acceso en línea:Texto completo