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EUV lithography /
Dr. Bakshi has compiled a thorough, clear reference text covering the important fields of EUV lithography for high-volume manufacturing. This book has resulted from his many years of experience in EUVL development and from teaching this subject to future specialists. The book proceeds from an histor...
| Clasificación: | Libro Electrónico |
|---|---|
| Otros Autores: | |
| Formato: | Electrónico eBook |
| Idioma: | Inglés |
| Publicado: |
Bellingham, Wash. : Hoboken, NJ :
SPIE Press ; John Wiley,
©2009.
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| Colección: | SPIE monograph ;
PM178. |
| Temas: | |
| Acceso en línea: | Texto completo |