Optical lithography : here is why /
This book is aimed at new and experienced engineers, technology managers, and senior technicians who want to enrich their understanding of the image formation physics of a lithographic system. Readers will gain knowledge of the basic equations and constants that drive optical lithography, learn the...
Clasificación: | Libro Electrónico |
---|---|
Autor principal: | |
Autor Corporativo: | |
Formato: | Electrónico eBook |
Idioma: | Inglés |
Publicado: |
Bellingham, Wash. :
SPIE,
2010.
|
Colección: | SPIE monograph ;
PM190. |
Temas: | |
Acceso en línea: | Texto completo |