Handbook of silicon based MEMS : materials & technologies /

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A comprehensive guide to MEMS materials, technologies and manufacturing, examining the state of the art with a particular emphasis on current and future applications. Key topics covered include: Silicon as MEMS material Material properties and measurement techniques Analytical methods used in materi...

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Detalles Bibliográficos
Clasificación:Libro Electrónico
Otros Autores: Lindroos, Veikko
Formato: Electrónico eBook
Idioma:Inglés
Publicado: Norwich, N.Y. : Oxford : William Andrew ; Elsevier Science [distributor], 2010.
Colección:Micro & nano technologies.
Temas:
Microelectromechanical systems.
Microelectromechanical systems > Materials.
Silicon > Electric properties.
Micro-Electrical-Mechanical Systems
Microsystèmes électromécaniques.
Microsystèmes électromécaniques > Matériaux.
Microelectromechanical systems
Acceso en línea:Texto completo

MARC

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245 0 0 |a Handbook of silicon based MEMS :  |b materials & technologies /  |c by Veikko Lindroos [and others]. 
260 |a Norwich, N.Y. :  |b William Andrew ;  |a Oxford :  |b Elsevier Science [distributor],  |c 2010. 
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490 1 |a Micro & nano technologies 
520 |a A comprehensive guide to MEMS materials, technologies and manufacturing, examining the state of the art with a particular emphasis on current and future applications. Key topics covered include: Silicon as MEMS material Material properties and measurement techniques Analytical methods used in materials characterization Modeling in MEMS Measuring MEMS Micromachining technologies in MEMS Encapsulation of MEMS components Emerging process technologies, including ALD and porous silicon Written by 73 world class MEMS contributors from around the globe, this volume covers materials selection as well as the most important process steps in bulk micromachining, fulfilling the needs of device design engineers and process or development engineers working in manufacturing processes. It also provides a comprehensive reference for the industrial R & D and academic communities. Veikko Lindroos is Professor of Physical Metallurgy and Materials Science at Helsinki University of Technology, Finland. Markku Tilli is Senior Vice President of Research at Okmetic, Vantaa, Finland. Ari Lehto is Professor of Silicon Technology at Helsinki University of Technology, Finland. Teruaki Motooka is Professor at the Department of Materials Science and Engineering, Kyushu University, Japan. . Provides vital packaging technologies and process knowledge for silicon direct bonding, anodic bonding, glass frit bonding, and related techniques . Shows how to protect devices from the environment and decrease package size for dramatic reduction of packaging costs . Discusses properties, preparation, and growth of silicon crystals and wafers . Explains the many properties (mechanical, electrostatic, optical, etc), manufacturing, processing, measuring (incl. focused beam techniques), and multiscale modeling methods of MEMS structures. 
505 0 |a Silicon as MEMS Material -- Modeling in MEMS -- Measuring MEMS -- Micromachining Technologies in MEMS -- Encapsulation of MEMS Components. 
588 0 |a Print version record. 
504 |a Includes bibliographical references and index. 
590 |a Knovel  |b ACADEMIC - Nanotechnology 
590 |a Knovel  |b ACADEMIC - Mechanics & Mechanical Engineering 
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650 0 |a Microelectromechanical systems. 
650 0 |a Microelectromechanical systems  |x Materials. 
650 0 |a Silicon  |x Electric properties. 
650 2 |a Micro-Electrical-Mechanical Systems 
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650 6 |a Microsystèmes électromécaniques  |x Matériaux. 
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650 7 |a Silicon  |x Electric properties.  |2 fast  |0 (OCoLC)fst01118637 
700 1 |a Lindroos, Veikko. 
776 0 8 |i Print version:  |t Handbook of silicon based MEMS.  |d Norwich, N.Y. : William Andrew ; Oxford : Elsevier Science [distributor], 2010  |z 9780815515944  |z 0815515944  |w (OCoLC)428777214 
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